A throughput calculation device, a throughput calculation method, and a computer readable recording medium on which a throughput calculation program is recorded

摘要

The processing result storage means (11) accumulates information on the result of processing the product by the etching apparatus as processing result information, and stores the apparatus characteristic storage means (12) Stores information indicating the characteristics of the etching apparatus as processing characteristic information. The process stability determination means 13 determines the process stability based on the process result information stored in the process result storage means 11 and the device characteristic information accumulated in the device characteristic storage means 12. [ When the process stability determining means 13 determines that the process is stable, the throughput automatic calculating means 14 calculates the etching rate. If the process stability judging means 13 judges that the process is not stable, the treatment rate re-calculating means 15 calculates the etching rate based on the result of actual etching by the etching apparatus. The processing condition determining means 16 determines an etching condition from the calculated etching rate.