LEAK DETECTING METHOD FOR VACUUM CONTAINER, MONITORING APPARATUS FOR FILM FORMATION QUALITY AND CONTINUOUS VACUUM FILM FORMATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a leak detecting method in which the consumption amount of helium gas used as a tracer gas can be reduced when the leak of the air to a plurality of vacuum containers in a vacuum film formation apparatus is detected and to obtain a vacuum film formation apparatus which is constituted in such a way that leak places in cathode parts, for sputtering, installed additionally at a plurality of vacuum containers can be specified in a very short time. ;SOLUTION: In a leak detecting method, a mixed gas of helium and neon is used as a tracer gas when the leak of the air from the outside to a plurality of vacuum containers 1 to 8 in a vacuum film formation apparatus is detected, and the mixing ratio of the helium to the neon in the tracer gas which is blown to the individual vacuum containers 1 to 8 is made different at the respective vacuum containers 1 to 8. In addition, in the vacuum film formation apparatus, the side of the air of cathodes 9 for sputtering is sealed airtightly by airtight containers 10 when the leak of the air from the outside of the cathodes 9, for sputtering, which are installed additionally at the plurality of vacuum containers is detected, and the mixed gas of the helium and the neon is supplied, as the tracer gas, to the airtight containers 10.;COPYRIGHT: (C)1999,JPO