SURFACE DEFECT TESTING METHOD AND SURFACE DEFECT TESTING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately and readily identify real void defects and false defects such as color unevenness or the like in a surface defect test of ICs. ;SOLUTION: Pick-up images are processed by an image process part 4 and presence or absence of any defects is decided by a defects decision part 5. Here, when any defects are not detected, an IC 1 is decided as a non-defective product, while when any defects are detected, brightness histogram is again taken limiting to the circumferential part of the defects, and any of void defects and false defects are specified by a defects and false defects decision part 6, and in the case of the voide defect, it is decided as a defective product and in the case of the false defect, it is decided as a non-defective product.;COPYRIGHT: (C)1999,JPO