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FRONT SURFACE DEFECT EVALUATION DEVICE, FRONT SURFACE DEFECT TESTING SYSTEM AND FRONT SURFACE DEFECT TESTING METHOD
FRONT SURFACE DEFECT EVALUATION DEVICE, FRONT SURFACE DEFECT TESTING SYSTEM AND FRONT SURFACE DEFECT TESTING METHOD
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机译:前表面缺陷评估装置,前表面缺陷测试系统和前表面缺陷测试方法
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摘要
PROBLEM TO BE SOLVED: To improve a detection rate, and make it possible to measure a front surface defect dimension of a level to be described in a testing record, in a front surface defect testing.SOLUTION: According to an embodiment, a front surface evaluation device 400 comprises: an input unit 410 that receives a two-dimensional image of appearance of an object acquired by an image acquisition unit 110 and targeted for testing, and a three-dimensional shape of the object measured by a shape measurement unit 120 as an input; and a computation unit 320 that acquires information about a front surface defect existing in a front surface of the object on the basis of image data serving as information about the acquired two-dimensional image, and shape data serving as information about the measured three-dimensional shape.SELECTED DRAWING: Figure 1
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