EXCIMER LASER DEVICE, EXCIMER LASER WORK SYSTEM AND ITS GAS SUPPLY/EXHAUST METHOD

摘要

PROBLEM TO BE SOLVED: To simplify gas piping for gas supply/exhaust in an excimer laser device, to reduce the leakage of gas, and to stably oscillate a laser. ;SOLUTION: An excimer laser device 2 supplying the plural types of laser gases is provided with supply piping 8 for gas supply. Gas supply piping 8 is branched in a bomb box 10 and is connected to the plural types of gas bombs. A plurality of excimer laser devices 2 are connected to one gas supply device and one gas exhaust device. The gas supply device and the gas exhaust device supply and exhaust gas to/from a plurality of excimer laser devices 2. When the supply/exhaust of gas are required, gas is supplied/exhausted based on the request of gas supply/exhaust from the respective excimer laser devices 2.;COPYRIGHT: (C)1999,JPO