ELECTROLYTE FOR ELECTROPLATING LOW STRESS CRACK RESISTANT RUTHENIUM LAYER, ITS PRODUCTION, AND UTILIZATION OF PYRIDINE AND N-ALKYLATED PYRIDIUM SALT AS ELECTROLYTE ADDITIVE

摘要

PROBLEM TO BE SOLVED: To obtain a thick ruthenium layer free from crack by containing pyridine or a N-alkylated prydinium salt. ;SOLUTION: The N-alkylated prydinium salt contained in the electrolyte is a compound expressed by a formula. In the formula, R' is H, a 1-6C alkyl, -CH=CH₂, =CO₂Na. Among the compounds, a particularly preferable one is 1-benzyl-3-sodium carboxy-pyridium chloride or the like. The content of pyridine or the said compound in the electrolyte is 0.1-100 g/l. The electrolyte composition contains ruthenium chloride and amide sulfuric acid and/or ammonium sulfaminate in a form forming a complex with ruthenium as a starting material. The content of ruthenium is controlled to 1-100 g/l and the content of amide sulfuric acid and/or ammonium sulfaminate is controlled to 1-10 g/l per 1 g/l ruthenium.;COPYRIGHT: (C)1999,JPO