Electrolyte for low-stress, crack-free ruthenium coatings

摘要

Pyridine or N-alkylated pyridinium salts are components of electrolytes containing ruthenium in the form of a sulfamic acid complex, for the electrolytic deposition of low-stress, crack-free ruthenium coatings. An electrolyte for the deposition of low-stress, crack-free ruthenium (Ru) coatings contains Ru in the form of a sulfamic acid complex and also pyridine or N-alkylated pyridinium salts of formula (I) R- = -(CH2)3-SO3-, -CH2-CHOH-CH2-SO3- or -CH2C6H5 Cl-; R1 = H, 1-6C alkyl, vinyl or -COONa Independent claims are also included for (a) a process for the production of this electrolyte by adding pyridine or a salt (I) to an aqueous acid solution containing Ru as a sulfamic acid complex; (b) a process for the production of low-stress, crack-free Ru coatings by the cathodic deposition of Ru from this electrolyte.