MANUFACTURE OF CAPACITORS FOR ANALOG FUNCTIONS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a capacitor in which constituents other than an upper electrode of the capacitor are prevented from being affected by a doping agent when doped and permitting the upper electrode as well as a lower electrode of the capacitor to have a sufficient doping level and substantially the same doping concentration with each other. ;SOLUTION: After polishing the upper surface of an upper electrode 112 of capacitor by CMP(chemical mechanical polishing), the capacitor is doped through the same processes as a lower electrode 106a of the capacitor. After the lower electrode 106a of the capacitor has been formed, a thermal oxidation step is performed so that impurity ions implanted to the lower electrode 106a of the capacitor are isolated at the upper surface of the lower electrode 106a of the capacitor. Consequently, the upper and the lower electrodes 112 and 106a of the capacitor are brought into substantially the same doping concentration at the interfaces with the upper and the lower electrodes.;COPYRIGHT: (C)1998,JPO