INSTRUMENT FOR DETECTING END POINT IN DRY TYPE TREATMENT FOR DRY TYPE TREATING APPARATUS AND METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a detecting instrument of an end point in dry type treatment for dry type treating apparatus which treats a material to be treated for removing in a chamber by a reaction with gas phase, and a method therefor. ;SOLUTION: The dry type treatment end point detecting instrument is provided with a heat conductivity detector 50 for detecting the variation of the heat conductivity of exhaust gas exhausted from the chamber 12 and a system controller 56 for detecting the end point of the treatment based on the variation of the heat conductivity. Before the end point of the treatment, the material to be treated is contained in the exhaust gas. Further, after the end point thereof, the material to be treated is not contained in the exhaust gas. In this reason, before and after the end point of the treatment for removing the material to be treated by utilizing plasma, the components in the exhaust gas are different, and the heat conductivities are different as well. Therefore, the end point of such a treatment can be detected by detecting the variation of the heat conductivity at this time.;COPYRIGHT: (C)1999,JPO