Method of measuring the amount of charge, the electrostatic energy measurement method and the charge amount measuring device

摘要

PURPOSE: To measure only the excess moving charges selectively and accurately, as it is in the production process, among charges induced in a conductor when the insulator part of an object comprising an insulator and a conductor, e.g. an LSI, is charged electrostatically. ;CONSTITUTION: A metal rod 14 is wrapped with a dielectric 4 having known capacitance and further wrapped with a metal plate 15 having ground potential. The wiring between an object and the dielectric 4 is integrated with the dielectric 4 such that the relative position is invariant. Since a metal plate 15 shields the external electromagnetic induction, the wiring between the object and the dielectric 4 is not deformed and the measurement is not subjected to fluctuation due to electromagnetic induction. Furthermore, the dielectric 4 has such structure as the capacitance is distributed along the moving path of the object and the dielectric 4 is charged sequentially with time difference from the part close to the object. Consequently, a voltmeter 5 is protected against instantaneous application of high voltage from the object and object and the charges to be measured are prevented from leaking to the ground through the voltmeter 5.;COPYRIGHT: (C)1995,JPO