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Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam
Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam
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机译:电荷量测量方法,带电束的位移值测量方法,电荷量测量装置和带电束的位移值测量装置
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摘要
A charge amount measurement method comprises: interposing a measurement subject between a first substance and a second substance having a through hole; measuring a first collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is no potential difference between the first substance and the second substance, measuring a second collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is a potential difference between the first substance and the second substance, and measuring a charge amount of the measurement subject based on a difference between the measured first collision position and the measured second collision position.
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