METHOD FOR ADAPTATION DECISION OF PROBE SHAPE AND METHOD FOR MEASURING SURFACE SHAPE

摘要

PROBLEM TO BE SOLVED: To decide a measurement area with good reliability by setting measured values of a rise angle, a fall angle of a standard sample which is too steep to be traced by a probe, as reference values of reliability failure, and comparing measured angle values of a measured sample with the reference values. ;SOLUTION: A standard sample 10 having a vertical rise, a vertical fall is scanned by a probe 13 of an atomic force microscope. A measurement locus 19 with a rise angle α, a fall angle β which cannot be measured because a measured shape at this time reflects a shape of the probe 13 is obtained. The angles α, β are stored as reference values. When a measued sample is scanned, a shape in which a part HI rises with an angle (X), a part LM rises with an angle α, a part JK falls with an angle β and a part NO falls with an angel (y) is obtained. The angles are compared with the reference values. Since the rise part LM is equal to the angle α and the fall part JK is equal to the angle β, the parts are judged to be not reliable. The other parts than the rise part LM and fall part JK are judged as an area measured with good reliability.;COPYRIGHT: (C)1999,JPO