METHOD OF MEASURING SURFACE SHAPE OF SOFT MATERIAL BY PROBE MICROSCOPE, AND PROBE MICROSCOPE USED FOR MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of measuring a surface shape of a soft material by a probe microscope allowing accurate measurement of the surface shape of the soft material including a droplet or a material that has high volatility, and is soft and easy to deform, and to provide a probe microscope used for the measuring method.;SOLUTION: In measuring the surface shape of a sample made of the soft material by the probe microscope, voltage is applied between the sample and a conductive probe, the bias dependence of a solid material part and liquid material part on the surface of the sample based on the correlation between resonance frequency component of the conductive probe and application bias is measured, a bias value at which electrostatic forces acting on the solid material part and liquid material part (refer to Fig. 3) are equal is determined, the sample surface is scanned while the distance between the sample and conductive probe is kept so that the magnitude of the electrostatic force is constant in an applied state using the determined bias value, and the surface shape of the sample is accurately measured.;COPYRIGHT: (C)2008,JPO&INPIT