SCANNING PROBE MICROSCOPE, METHOD OF MEASURING SAMPLE SURFACE SHAPE, AND PROBE DEVICE

摘要

A scanning probe microscope where a detection mechanism is reduced in size and weight to enable the microscope to accurately measure a three-dimensional sample shape. A scanning prove microscope (10) has an XY sample stage (14), a cantilever (16) supported as a cantilever at one end by a scanning mechanism (22) and having a probe (24) fixed at the other end as the free end, the scanning mechanism (22) having a piezoelectric element (18X), a piezoelectric element (18Y), and a piezoelectric element (18Z) for moving the cantilever (16) in the X-direction, Y-direction, and Z-direction, and a scan control circuit (20). Further, an oscillating piezoelectric element (28) driven by a high frequency signal from an oscillator (26) to oscillate the cantilever (16) is fixed to that side of the cantilever which is supported in a cantilever manner. Further, a strain resistance element (30), a self-detection-type sensor, is embedded in the cantilever (16).