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Method for inactivating a light-receiving surface of a substrate of an indium-antimony photodetector and indium-antimony photodetector
Method for inactivating a light-receiving surface of a substrate of an indium-antimony photodetector and indium-antimony photodetector
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机译:使铟锑光电探测器的基板的光接收表面失活的方法和铟锑光电探测器
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摘要
The light receiving or back-side surface (22) of an indium antimonide (InSb) photodetector device (10) substrate (12) is cleaned to remove all oxides of indium and antimony therefrom. Passivation and/or partially visible light blocking layers (26, 28) are then formed thereon of a material which does not react with InSb to form a structure which would have carrier traps therein and cause flashing. The optical cutoff wavelength and thickness of the partially visible light blocking layer (28) are selected to suppress the avalanche effect in the device (10) at visible wavelengths. This enables the device (10) to operate effectively over a wide wavelength range including the visible and infrared bands. The passivation and/or partially visible light blocking layers (26, 28) may be a thin layer of a semiconductor such as germanium, or silicon dioxide and/or silicon nitride followed by a partially visible light blocking silicon layer.
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