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METHOD FOR FORMATION OF INDIVIDUAL PHOTODETECTOR ELEMENTS ON A SUBSTRATE AND A PHOTODETECTOR ARRANGEMENT PRODUCED BY THIS METHOD
METHOD FOR FORMATION OF INDIVIDUAL PHOTODETECTOR ELEMENTS ON A SUBSTRATE AND A PHOTODETECTOR ARRANGEMENT PRODUCED BY THIS METHOD
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机译:在基质上形成单个光电检测器元素的方法以及通过该方法产生的光电检测器排列
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摘要
A novel mask is used to contour the photodetector body and adhesive layer of a photodetector device on a substrate in which the mask apertures define an angle with the plane of the substrate. Air abrasion at that angle removes unwanted portions of the photodetector body and adhesive layer, leaving a contour desirable for subsequent interconnect metallization.
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