It is good/the defective decision device and manner null

摘要

PROBLEM TO BE SOLVED: To prevent erroneous judgment by setting a master image pattern and a pattern comparison correlation level every kind of product and every pretreatment manufacturing system and manufacturing condition. ;SOLUTION: States of bonding wires and positions in a device 70 to be tested are inputted as an image to an optical system unit 1 and pretreatment manufacturing system number/manufacturing condition of the device 70 and the kind of product of the device 70 are inputted from an input unit 10. The obtained image is preprocessed by a preprocessor 2 and the preprocessed image is set in a memory 3 of a pattern image to be tested. A master image pattern and a pattern comparison correlation level of the pretreatment manufacturing system number/manufacturing condition and the kind of product are read from a master image file 9 and are set in a master image memory 6. Subsequently, the correlation value between the pattern to be tested in the memory 3 and the master pattern in the memory 6 is obtained by a pattern comparing unit 4 and a computer 7 judges whether the device is non-defective or defective on the basis of the obtained correlation value.;COPYRIGHT: (C)1998,JPO