METHODS AND SYSTEMS FOR DELIVERING AN ULTRA-PURE GAS TO A POINT OF USE

摘要

Methods and systems of delivering ultra-high purity gas to a point ofuse are claimed and described The methods include providing a source ofultra-high purity liquid (the source preferably at a pressure and temperaturesufficient to maintain the liquid in substantially the liquid phase); transporting(preferably via pressure in the source alone) the ultrahigh purity liquid fromthe source to one or more means to effect a phase change of the ultra-highpurity liquid to an ultrahigh purity gas; effecting a phase change (preferablyat or near equilibrium vaporization conditions) of the ultra-high purity liquid toform an ultra-high purity gas in the one or more means to effect the phasechange; and routing the ultra-high purity gas from the means to effect thephase change to a point of use (preferably with no intermediate, potentiallyimpurity-generating media between the means to effect the phase changeand the point of use other than ultra-clean conduit).