High Frequency Induction Plasma Torch for Vapor Synthesis and Thin Film Coating of Diamond and Non-oxide Ceramic Powders

摘要

The present invention is excellent in thermal conductivity, extremely low electrical conductivity, corrosion resistance and high hardness, synthesized with non-oxide ceramic powder including diamond or metal nitride, or semiconductor type thin film coating or cutting tool bite tightly and firmly It relates to the structure and application of high frequency induction plasma torch.;In order to synthesize high quality diamond powder, non-oxide ceramic powder including metal nitride, or these thin films, this plasma torch may be installed in a vacuum chamber, and mass production may be performed in air.;Liquid nitrogen purge method is selected to obtain non-oxide ceramic powder including powdered diamond or metal nitride.;And this reaction torch is an electrodeless torch adopting the method of generating high frequency induction plasma, so that the wear of the electrode does not occur and has the excellent durability.