Stoker for wafer storage in semiconductor manufacturing facilities

摘要

SUMMARY OF THE INVENTION The present invention allows a simple and rapid loading and conveying operation of a wafer in a loading section installed between an exposure machine and an application / developer during a wafer manufacturing process. In the loading section installed between the developer and stacking the wafer, the robot arm installed in the exposure machine and the coating / developing machine to grasp and move the wafer is pulled in and out, and the stacking groove for inserting two wafers at the same time is multi-stage. It is made of a stocker formed as.