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Probe card for wafer test and wafer tester with same

机译:用于晶片测试的探针卡以及具有该探针卡的晶片测试仪

摘要

The present invention discloses a probe card for a wafer test and a wafer tester having the same, by adjusting the vertical rising height of the wafer to prevent the tip from being damaged by the lower pressure. The probe card for a wafer test is a printed circuit board, a needle-shaped tip attached to a predetermined surface of the lower portion of the printed circuit board through a fixture, and outputting a test signal, and one end thereof is located at the bottom of the printed circuit board. And a tip guard attached to another predetermined surface of the substrate to support the printed circuit board and prevent the tip from being damaged due to the rise of the wafer in contact with the tip.
机译:本发明公开了一种用于晶片测试的探针卡和具有该探针卡的晶片测试仪,其通过调节晶片的垂直上升高度以防止尖端被较低的压力损坏。用于晶片测试的探针卡是印刷电路板,针形尖端通过固定装置附接到印刷电路板下部的预定表面上,并输出测试信号,并且其一端位于电极板上。印刷电路板的底部。尖端保护器附接到基板的另一预定表面上以支撑印刷电路板并防止尖端由于与尖端接触的晶片的上升而损坏。

著录项

  • 公开/公告号KR19990057726A

    专利类型

  • 公开/公告日1999-07-15

    原文格式PDF

  • 申请/专利权人 윤종용;

    申请/专利号KR19970077798

  • 发明设计人 최우성;

    申请日1997-12-30

  • 分类号H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-22 02:16:57

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