PREPARATION METHOD OF DIAMOND THIN FILM BY ATOMIC HYDROGEN ASSISTED LASER ABLATION

摘要

The present invention relates to a method of forming a diamond thin film by a laser ablation method. More specifically, in forming a diamond thin film on a substrate by the laser ablation method of the present invention to supply an atomic hydrogen beam (atomic hydrogen beam) on the substrate from the outside to form a high quality diamond thin film It is about.;In the diamond thin film formation method according to the laser ablation method according to the present invention, the laser beam generated from the excimer laser 1 is irradiated to the graphite target 2, and the particles protruding by the laser beam irradiation are subjected to the substrate heater 3. In the diamond thin film formation method by the laser ablation method of depositing a diamond thin film by depositing on a substrate (4) located on the substrate 4, the substrate (4) using a separate atomic hydrogen supply means (5) during the deposition process And further supplying an atomic hydrogen beam onto the bed.