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Chemical transport tank and chemical supply device using the same

机译:化学品运输罐和使用该化学品运输罐的化学品供应装置

摘要

The present invention relates to a chemical transport container and a chemical supply device using the same, wherein the chemical transport operation is efficient, can cope with environmental problems, and facilitates chemical supply to a process facility. The chemical transport container includes a storage tank for accommodating the chemical, and The upper plate is installed to seal the upper portion, the chemical discharge pipe and N 2 gas inlet pipe installed through the upper plate, and the valve is installed on the upper end of the chemical exhaust pipe N 2 gas inlet pipe respectively to selectively open and close the flow path, The supply device includes a service tank for storing a certain amount of chemical, a chemical supply line connected to transfer chemicals in the chemical transport container to the service tank, an N 2 supply line for injecting N 2 gas into the chemical transport container, and the chemical supply amount. Phrase as control unit to control It will cost.;Therefore, it is convenient to transport and supply chemicals, thereby improving workability and productivity, preventing environmental pollution by chemicals, and maintaining the quality without changing chemical contamination and properties even during long-term storage of chemicals.
机译:化学品运输容器和使用该化学品运输容器的化学品供应装置技术领域本发明涉及化学品运输容器和使用该化学品运输容器的化学品供给装置,其中化学品运输操作是有效的,可以应对环境问题,并且便于向处理设备供应化学品。化学品运输容器包括用于容纳化学品的储罐,并且安装有上板以密封上部,化学品排放管和穿过上板安装的N 2 进气管,以及阀门分别安装在化学品排气管N 2 进气管的上端,以选择性地打开和关闭流路。供应装置包括一个用于存储一定量化学品的维修箱,化学品供应管线,用于将化学品运输容器中的化学品转移到服务罐; N 2 供气管线,用于将N 2 气体注入化学品运输容器中;供应量。短语作为控制单位,将控制成本。因此,运输和供应化学品非常方便,从而提高了可操作性和生产率,防止了化学品对环境的污染,即使在长期存储期间也不会改变化学品的污染和特性,从而保持质量化学药品。

著录项

  • 公开/公告号KR0174994B1

    专利类型

  • 公开/公告日1999-04-01

    原文格式PDF

  • 申请/专利权人 SAMSUNG ELECTRONICS CO. LTD.;

    申请/专利号KR19960004816

  • 发明设计人 박홍식;

    申请日1996-02-27

  • 分类号H01L21/304;

  • 国家 KR

  • 入库时间 2022-08-22 02:16:21

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