removal of hydrogen containing silanen from organosilanen

摘要

The instant invention is a process for the removal of hydrogen-containing silane impurities from organosilanes with similar boiling points. In the instant invention, the hydrogen-containing silane is reacted with a hydrogen halide to replace the hydrogen on the silane with a halide and create a modified silane. The substitution of the heavier halide for the hydrogen, increases the boiling point of the modified silane. This increase in boiling point facilitates separation by distillation of the modified silane impurity from the desired organosilanes.