Brief description of embodiments of the two communication cavities in a substrate made of monocrystalline material by anisotropic chemical etching

• 1. 包括两个腔室和通过阀门连接这两个腔室的气流通道的气囊,阀门位于气流通道中 [P] . 中国专利： CN104093607A . 2014-10-08
• 2. 无菌液体纸板包装中具有切割箔纸并折向内部的装置的螺纹盖子实施例 [P] . 中国专利： CN104870325A . 2015-08-26
• 3. METHOD FOR PRODUCING TWO COMMUNICATING CAVITIES IN A SUBSTRATE OF MONOCRYSTALLINE MATERIAL BY CHEMICAL ANISOTROPIC ETCHING [P] . 世界知识产权组织专利： WO9843465A1 . 1998-10-01

  机译： 化学各向异性刻蚀在单晶材料基质中制备两种连通腔的方法

• 4. METHOD OF MAKING TWO COMMUNICATING CAVITIES IN A SUBSTRATE OF MONOCRYSTALLINE MATERIAL BY ANISOTROPIC CHEMICAL ENGRAVING [P] . 法国专利： FR2761199A1 . 1998-09-25

  机译： 各向异性化学刻蚀在单晶材料基质中形成两个连通腔的方法。

• 5. Brief description of embodiments of a device comprising a stack of quantum boxes on a silicon substrate or monocrystalline germanium [P] . 法国专利： FR2797093B1 . 2001-11-02

  机译： 包括在硅衬底或单晶锗上的量子盒堆的设备的实施例的简要描述

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• 6. Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching [O] . Hidetaka Asoh, Kosuke Fujihara, Sachiko Ono 2012
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