Method for formation of a self-aligned emission grid for field emission devices and device using same

摘要

According to the present invention, there is provided a method for forming an emitter grid in a substrate of a field emission display. In one embodiment of the invention, the method includes the step of forming an emitter in a trench in the substrate, the trench having a dimension which is substantially the same as a desired dimension of the emitter grid, disposing a dielectric layer on the substrate, and disposing a grid material layer on the dielectric layer. The field emission display is then planarized to expose a portion of the dielectric which contacts the emitter.