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Tantalum adhesion layer and reactive-ion-etch process for providing a thin film metallization area
Tantalum adhesion layer and reactive-ion-etch process for providing a thin film metallization area
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机译:钽粘附层和反应离子刻蚀工艺,可提供薄膜金属化区域
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摘要
A method for providing a thin film metallization area on a substrate is disclosed comprising the steps of: depositing a Ta adhesion layer on the surface of the substrate seed layer, conducting a photo resist process on the Ta adhesion layer to define the thin film metallization area, including a remnant removal process to remove remnant photo resist process material in the thin film metallization area to the Ta adhesion layer, the Ta adhesion layer preventing the remnant removal from reaching the seed layer, conducting a Ta removal reactive-ion-etch process to remove the Ta adhesion layer in the thin film metallization area, so that the seed layer is exposed in the metallization area. A metal material may then be deposited in the metallization area.
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