首页> 外国专利> RESIN FOR TEMPORARY ADHESION, RESIN LAYER FOR TEMPORARY ADHESION, HARD SUBSTRATE PROVIDED WITH RESIN LAYER FOR TEMPORARY, THIN-FILM SUBSTRATE LAYERED BODY, AND PROCESS FOR PROCESSING THIN-FILM SUBSTRATE

RESIN FOR TEMPORARY ADHESION, RESIN LAYER FOR TEMPORARY ADHESION, HARD SUBSTRATE PROVIDED WITH RESIN LAYER FOR TEMPORARY, THIN-FILM SUBSTRATE LAYERED BODY, AND PROCESS FOR PROCESSING THIN-FILM SUBSTRATE

机译:用于临时粘合的树脂,用于临时粘合的树脂层,用于临时,薄膜基质层状实体的硬质基质和树脂层,以及用于处理薄膜基质的过程

摘要

To provide a resin layer for temporary adhesion, whereby a thin-film substrate used in a display, a component in an electronic device, etc., can be reliably fixed/conveyed and processed without positional misalignment, a vacuum device is not affected by decomposition or contaminants such as evolved gas (outgassing), there is no infiltration of strong acids or polar solvents during patterning, and adhesion can be satisfactorily maintained in processing of the thin-film substrate, even in heat-treatment thereof. Provided are: a resin for temporary adhesion, for temporarily adhering a thin-film substrate to a hard substrate as a base during processing of the thin-film substrate, the resin for temporary adhesion characterized by including at least one type of fluororesin; and a resin layer for temporary adhesion, formed from the resin for temporary adhesion.
机译:为了提供用于临时粘合的树脂层,从而可以可靠地固定/输送和处理显示器中使用的薄膜基板,电子设备中的组件等而不会发生位置偏移,真空装置不受分解的影响或诸如放出气体(除气)之类的污染物,在图案化过程中不会渗透强酸或极性溶剂,即使在薄膜基板的热处理中,也可以令人满意地保持粘附性。本发明提供一种临时粘接用树脂,其特征在于,包括至少一种氟树脂,该临时粘接用树脂用于在薄膜基板的加工过程中将薄膜基板临时粘接在作为基材的硬质基板上。由临时粘合用树脂形成的临时粘合用树脂层。

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