首页> 外国专利> Resin composition, resin layer, permanent adhesive, temporary adhesion adhesive, laminated film, wafer processing body, and manufacturing method of electronic component or semiconductor device

Resin composition, resin layer, permanent adhesive, temporary adhesion adhesive, laminated film, wafer processing body, and manufacturing method of electronic component or semiconductor device

机译:树脂组合物,树脂层,永久粘接剂,临时粘接剂,层压膜,晶片处理体以及电子部件或半导体装置的制造方法

摘要

The present invention provides a resin composition with which a substrate for electronic-circuit formation or a substrate for semiconductor-circuit formation can be bonded to a supporting substrate and which, in the state of being bonding a substrate for electronic-circuit formation or substrate for semiconductor-circuit formation that has a thickness of 1-100 µm, has excellent heat resistance. The resin composition undergoes no change in adhesive strength even through production steps for electronic components, semiconductor devices, etc., and can be thereafter removed at room temperature under mild conditions. The present invention further provides: an adhesive, a resin layer, a layered film, and a processed wafer each comprising or obtained using the resin composition; and a process for producing an electronic component or semiconductor device using these. The resin composition of the present invention comprises (a) a polyimide resin having a specific structure and (b) a crosslinking agent containing a fluorene group.
机译:本发明提供了一种树脂组合物,通过该树脂组合物可以将用于电子电路形成的基板或用于半导体电路形成的基板粘合到支撑基板,并且该树脂组合物在被粘合的状态下用于电子电路形成的基板或用于固化的基板。厚度为1-100 µm的半导体电路结构具有极好的耐热性。该树脂组合物即使在电子部件,半导体装置等的制造工序中,粘合强度也没有变化,可以在室温下,温和的条件下除去。本发明进一步提供:粘合剂,树脂层,层状膜和加工后的晶片,其各自包含或使用所述树脂组合物获得;以及使用它们的电子部件或半导体装置的制造方法。本发明的树脂组合物包含(a)具有特定结构的聚酰亚胺树脂和(b)含有芴基的交联剂。

著录项

  • 公开/公告号JPWO2017138447A1

    专利类型

  • 公开/公告日2018-12-06

    原文格式PDF

  • 申请/专利权人 東レ株式会社;

    申请/专利号JP20170506946

  • 发明设计人 有本 真治;藤原 健典;岡沢 徹;

    申请日2017-02-03

  • 分类号C08L79/08;C09J7/20;C09J179/08;H01L21/683;H01L21/304;C08L63;C08K5/103;C08K5/45;

  • 国家 JP

  • 入库时间 2022-08-21 12:17:10

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号