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Dielectric material having a low dielectric loss factor for high- frequency use
Dielectric material having a low dielectric loss factor for high- frequency use
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机译:用于高频的介电损耗因子低的介电材料
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摘要
A dielectric material having a low dielectric loss factor for high- frequency use, which comprises a sintered product of silicon nitride chiefly composed of silicon nitride and containing at least oxygen as an impurity component or oxygen as an impurity component and a compound of an element of the Group 3a of periodic table, wherein said sintered product contains aluminum in an amount which is not larger than 2% by weight reckoned as an oxide thereof having relative densities of not smaller than 97% and has a dielectric loss factor at 10 GHz ofnot larger than 5×10.sup.-4. The dielectric material has excellent mechanical properties such as large strength and excellent chemical stability, features small dielectric loss factor in high-frequency regions, and is suited for use as a material for high-frequency oscillators, antennas, filters and electronic circuit boards. In particular, those dielectric materials are suited for use as window materials for introducing high frequencies in a high-frequency plasma- generating CVD apparatus, a microwave wave output unit and an oscillator.
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