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Nondestructive optical techniques for simultaneously measuring optical constants and thicknesses of single and multilayer films
Nondestructive optical techniques for simultaneously measuring optical constants and thicknesses of single and multilayer films
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机译:同时测量单层和多层膜的光学常数和厚度的无损光学技术
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摘要
An optical technique (apparatus and method based on the use of power spectral density analysis of spectroscopic multiple angle reflection and transmission data is disclosed. The apparatus and methods measure optical constants (n, k) and thicknesses of single and multilayer films. The apparatus and method provide for index determination with high accuracy (0.00001).
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