首页>
外国专利>
Nondestructive optical technique for simultaneously measuring optical constants and thickness of thin films
Nondestructive optical technique for simultaneously measuring optical constants and thickness of thin films
展开▼
机译:同时测量薄膜的光学常数和厚度的无损光学技术
展开▼
页面导航
摘要
著录项
相似文献
摘要
Optical systems and methods that simultaneously measure optical constants (n, k) and thickness of thin films. The systems and methods use of differential polarimetry (differential analysis of spectroscopic multi-angle reflection and ellipsometric data) to measure optical constants (n k) and thickness of ultra-thin films.
展开▼