首页> 外国专利> Acidic ion-exchange resin and from those photoresist compositions as a catalyst in order to synthesize the novolak resin

Acidic ion-exchange resin and from those photoresist compositions as a catalyst in order to synthesize the novolak resin

机译:酸性离子交换树脂,并由这些光致抗蚀剂组合物作为催化剂,以合成酚醛清漆树脂

摘要

(57) Abstract This invention, using the solid acidic condensation catalyst, the molecular weight of the fixed range and very low offers the method of producing the water insoluble water alkaline dissolved novolak resin which possesses the metal ion of re be ru. Very low using method and that kind of photoresist composition which produce the photoresist composition which possesses the metal ion of level from that kind of novolak resin, also the method of producing the semiconductor device is offered.
机译:(57)<摘要>本发明使用固体酸性缩合催化剂,使分子量在固定范围内并且非常低,提供了一种制备具有re re ru金属离子的水不溶性水碱性溶解的线型酚醛清漆树脂的方法。提供了一种非常低的使用方法和由这种酚醛清漆树脂生产具有一定水平金属离子的光刻胶组合物的光刻胶组合物,还提供了一种制造半导体器件的方法。

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