ACIDIC ION EXCHANGE RESIN AS A CATALYST TO SYNTHESIZE A NOVOLAK RESIN AND PHOTORESIST COMPOSITION THEREFROM

摘要

The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having consistentmolecular weight and a very low level of metal ions, utilizing a solid acid condensation catalyst. A method is also provided for producingphotoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices usingsuch photoresist compositions.