Uses the piezo-electric device the XY scanner table null for the tunnel electron microscope

摘要

PURPOSE:To provide a scanner table which is small in errors in any scanning range and excels in the straightness of movement and the stability of posture of a probe by providing a first and a second coupling member in the end surface of a first and a second piezoelectric element for X-directional driving. CONSTITUTION:A first and a second piezoelectric element 31, 32 for X-directional driving are fixed on the left and right sides of a table 30, and block-like coupling members 33, 34 respectively are mounted on the other ends thereof. Also, piezoelectric elements 35, 37, 36, 38 for Y-directional driving respectively are mounted on both surfaces of the coupling members 33, 34. Further, the other ends of the piezoelectric elements 35, 36 for Y-directional driving are mounted on a first fixation part 41 and the other ends of the piezoelectric elements 37, 38 for Y-directional driving are mounted on a second fixation part 42, respectively. Thus, a one-dimensional table is constituted in a double form with the table 30, the piezoelectric elements 31, 32, the coupling members 33, 34 and the piezoelectric elements 35, 37, 36, 38 arranged in the shape of H, thereby being able to perform operation without XY interference. That is, since two axes of X and Y do not cause interference, the straightness of movement can be improved.