Of using the atmospheric pressure plasma supply system and its device the atmospheric pressure plasma occurrence method

摘要

PURPOSE: To provide an atmospheric plasma generator as well as an atmospheric plasma generation method, having the capability of generating a homogeneous glow discharge under the application of extremely small power even when such gases as air, nitrogen and oxygen are used, and ensuring high energy efficiency as well as high reaction efficiency. CONSTITUTION: This atmospheric plasma generator has an electrode pair 1 formed out of an electrode 1a connected to an AC power supply 5 and an earth electrode 1b, and AC electrical field is applied across the pair 1 in the presence of gases to generate a glow discharge plasma under the atmospheric pressure. Regarding the generator so formed, the gap of the electrode pair 1 is filled with particle type materials 4 made of a conductor covered with an insulator all around. In this case, the conductor 4 is metal and the insulator is an inorganic dielectric substance. Also, the electrode pair 1 is a metallic net. Furthermore, AC electrical field is applied across the pair 1 in the presence of gases, using the generator, thereby generating a glow discharge plasma under the atmospheric pressure. Also, the gases are mainly composed of the air.