Abstract Topic It is strong in the physical properties of the sample which evaluates the roughness of the surface dependenceIt makes evaluation method of the dielectric which satisfies fixed condition without doing,Evaluation of the surface roughness which was te general purpose, had certainty non connectionThe surface roughness evaluation method which can do quickly with touching is offeredru. Solutions In the sample 2 which is the dielectric from the laser illuminant 1In angle of incidence 0 to irradiate the laser, dispersion buriyusuta angle B1To receive the scattered wave in with polarization bimusupuritsuta 3, S partialTo acquire the wave component with 1st photodetector 4, the P polarized wave component 2nd lightYou acquire with detector, 5 acquire from 1st and 2nd photodetector 4,5Are done ratio of the S polarized wave component and the P polarized wave component which computer 6Compared with the specified criteria data roughness of the evaluation aspect of sample 2You evaluate.
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