PROBLEM TO BE SOLVED: To speed up a versatile evaluation by evaluating the roughness of a surface based on the ratio between an S polarized component of a scatter wave and P polarized component, under a condition wherein a scatter polarization angle meets a specific equation according to an incident angle of electromagnetic wave and a relative refractive index of a medium on electromagnetic wave incident side against the medium on electromagnetic wave transmission side.;SOLUTION: The device 1 comprises a laser light source 11, optical detectors 15 and 16, and computer 17, etc. With this configuration, electromagnetic-wave incident-side medium facing a surface with small surface roughness is arrayed parallel to a metal evaluation surface, in non-contact manner, with an electromagnetic-wave transmission-side medium in between, which is irradiated with an electromagnetic wave comprising S polarized wave and P polarized wave at an incident angle θOm from the electromagnetic-wave incident-side medium. The evanescent wave to the metal surface has a relative refractive index n=iα against the electromagnetic-wave transmission-side medium. The roughness of an evaluation surface is evaluated based on the ratio between the S polarized component of the scattered wave and P polarized component under a condition wherein a scattered polarization angle ΘBm at the incident-side medium meets an equation, according to the electromagnetic-wave incident angle θOm and a relative refractive index ng of the incident-side medium relative to the electromagnetic-wave transmission-side medium.;COPYRIGHT: (C)2001,JPO
展开▼
