Micro optical devices and electrostatic micro optical device

摘要

PURPOSE: To provide an optical device which is good in driving efficiency and is small in size and light in weight by providing the optical device with a driving means for moving a movable substrate with a formed zone plate in the direction orthogonal to the optical axis of a Fresnel zone (FZP). ;CONSTITUTION: The FZP 1 is formed by means, such as microlithography, on a light transparent substrate 2 which consists of, for example, glass, polysilicon, polycarbonate, etc. A pair of elastic supporting members 3 consist of leaf springs which are connected at one end to the light transmissive substrate 2 and at the other end to a fixing member 6, respectively. The magnetic thin films 4 are magnetic thin films formed by means, such as sputtering, on the elastic supporting members 3. Stationary electromagnets 5 are disposed to respectively face the magnetic thin films 4 and are composed of printed coils, etc. Electromagnetic attraction force or repulsion force acts between the magnetic thin films 4 by energizing the stationary electromagnets 5. The FZP 1 is moved in the direction orthogonal to its optical axis by the balance of the driving force generated in such a manner and the elastic force of the elastic supporting members 3.;COPYRIGHT: (C)1995,JPO