Manufacturing method of the electrostatic actuator electrostatic actuator, micro switch, micro-optical switch, micro optical switch systems, and communication device

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of constituting a microswitch having a long service life.;SOLUTION: This switch, having the actuator, has a structure in which two supporting columns 3 are provided on a base 1, and an oscillating plate 5 is placed on the supporting column. The oscillating plate 5 is journaled (pivoted) by two portions of the supporting column 3. The oscillating plate 5 is constituted of an electromagnetic body and receives the electrostatic force of suction electrodes 2a, 2b. Since the switch is constituted by journaling the oscillating plate 5 by means of the supporting column 3, a narrow beam is not necessary for supporting the oscillation plates 5.;COPYRIGHT: (C)2006,JPO&NCIPI