Electrostatic actuator, microswitch, micro optical switch, electronic device, and method of manufacturing electrostatic actuator

摘要

The present switch including the present actuator has a supporting column on a substrate, and a cap plate provided on the supporting column. The supporting column pivotally supports the cap plate. At ends of the cap plate, a plurality of beams are provided, respectively. The plurality of beams are subjected to electrostatic force of absorbing electrodes. According to the present switch, tilting directions of the cap plate (beams) can be set freely. Therefore, by providing the beams in a plurality of directions desired by a user and positioning the absorbing electrodes on the substrate so that the absorbing electrodes respectively correspond to the beams, the cap plate can be tilted in a plurality of desired directions. With this arrangement, the present switch has high degree of freedom as to the positions and number of substrate contact points.