SILICA-BASED MEMBRANE-FORMING LIQUID FOR APPLICATION, HAVING LOW DIELECTRIC CONSTANT AND PREFORM ATTACHED WITH LOW DIELECTRIC CONSTANT MEMBRANE

摘要

PROBLEM TO BE SOLVED: To obtain the subject application liquid having a low specific dielectric constant, capable of forming an insulating membrane excellent in microphoto- lithograph process and useful for a semiconductor device by containing specific ratios of silica-based fine particles having phenyl group and an oxidation decomposable resin. ;SOLUTION: This silica-based membrane-forming liquid for application, having a low dielectric constant, contains (A) silica-based fine particles having phenyl group and obtained by bonding one kind and/or two or more kinds of hydropysate selected from a phenyl group-containing alkoxysilane of formula II [R² is phenyl; (p) is 0-3] or phenyl group-containing chlorosilane of formula III [X' is chlorine; (q) is 1-3; (p+q) is ≤4] on the surface of a part of silica fine particles obtained by hydrolyzing or maturing after the hydrolysis of one kind, or two or more kinds of alkoxysilane of formula I [X is H, F, a 1-8C alkyl or the like; R¹ is H, a 1-8C alkyl, vinyl or the like; (n) is 0-3], and (B) a oxidation decomposable resin such as a cellulosic resin, and also the weight ratio of the components (A) to (B) is in a range of 0.5-5.;COPYRIGHT: (C)1999,JPO