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CYLINDER GRINDING METHOD FOR MONOCRYSTAL AND CYLINDER GRINDING DUMMY TAIL FOR MONOCRYSTAL
CYLINDER GRINDING METHOD FOR MONOCRYSTAL AND CYLINDER GRINDING DUMMY TAIL FOR MONOCRYSTAL
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机译:单晶圆柱磨削方法和单晶圆柱磨削尾巴
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摘要
PROBLEM TO BE SOLVED: To prevent a body part from cracking in the case of grinding its side surface by using a dummy tail and make grinding a side surface of the body part capable of bringing into a complete cylindrical shape. ;SOLUTION: An inner side surface of a disk 11 is connected by a bonding agent so as to conform a respective axis to both end faces of a body part 1, next respective dummy tails 12 are connected through a plurality of bolts 13 to an outer side surface of this disk 11. A tip end 12a of the dummy tail 12 is formed of partly a ball of semi-sphere or the like. When the body part 1, placed in a horizontal condition, is clamped in an inner side direction to the both end dummy tails 12 by fitting the body part 1 to clamping cups 3a, 3b of a cylinder grinding device, the body part, by forming the tip end 12a of the dummy tail 12 of partly a ball of semi-sphere or the like, is clamped in a condition that axes of the dummy tail 12 and the clamping cups 3a, 3b are completely conformed.;COPYRIGHT: (C)2000,JPO
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