DEFECT ANALYSIS APPARATUS FOR PERFORMING DEFECT NAVIGATION OVER DEVICE UNDER TEST

摘要

PROBLEM TO BE SOLVED: To provide a defective IC analysis apparatus which can efficiently perform data transfer between a plurality of such defective IC analysis apparatuses. ;SOLUTION: A defective IC analysis apparatus 10 outputs a status data 16. A positional coordinate contained in the status data 16 is defined as a coordinate on the apparatus 10. The data 16 is inputted to a data input part 20 of an EB tester 12 and then written in a hard disk as analysis data (A)34. The data (A)34 is read out by a data converter 22. The converter 22 converts the coordinate data obtained at the apparatus 10 into positional data having a CAD coordinate format usable in the tester 12. A CAD navigation unit 24 causes a CAD image of a mask pattern of a device 42 under test to be displayed on a display unit 32. When analysis data (A')36 is read into the navigation unit 24, the navigation unit 24 displays information based on the data (A') on the CAD image of the mask pattern displayed on the display unit 32.;COPYRIGHT: (C)2000,JPO