QUANTITATIVE MEASURING METHOD FOR DLC FILM BY USING RAMAN SPECTROSCOPY

摘要

PROBLEM TO BE SOLVED: To obtain a quantitative measuring method which does not require labor and time so much and which prevents the occurrence of a case in which a DLC film cannot be quantita tively determined or in which the quantitatively determined result of the DLC film is not reliable. ;SOLUTION: The approximate value of a base is decided by a straight line on the basis of two points A, B in positions which sandwich two peaks of a measuring spectrum. After that, the base of the measuring spectrum is corrected in such a way that the inclination the straight line as the approximate value becomes horizontal. Then, by using the spectrum whose base is corrected, respective approximate values which are used as initial parameters for the peaks are found. The approximate values of positions for the peaks are found by, e.g. an MEM method or the like other than a waveform separation calculation. The approximate value of the height of the peaks and that of the width between the peaks are found on the basis of the measuring spectrum or by the waveform separation calculation based on the measuring spectrum whose base is corrected. The found approximate value of the peaks and that of the base are used as initial values for respective parameters, and the respective parameters of the peaks and the base of the measuring spectrum are found by the waveform separation calculation. As a result, a diamondlike carbon(DLC) film is quantitatively calculated on the basis of the respective found parameters.;COPYRIGHT: (C)2000,JPO