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DISSOLUTION INHIBITOR FOR CHEMICAL AMPLIFICATION TYPE PHOTORESIST AND CHEMICAL AMPLIFICATION TYPE PHOTORESIST COMPOSITION CONTAINING SAME
DISSOLUTION INHIBITOR FOR CHEMICAL AMPLIFICATION TYPE PHOTORESIST AND CHEMICAL AMPLIFICATION TYPE PHOTORESIST COMPOSITION CONTAINING SAME
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机译:化学增幅型光致抗蚀剂的溶解抑制剂和化学增幅型光致抗蚀剂组合物
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摘要
PROBLEM TO BE SOLVED: To obtain a dissolution inhibitor for a chemical amplification type photoresist and a chemical amplification type photoresist compsn. contg. the dissolution inhibitor. ;SOLUTION: The dissolution inhibitor for a chemical amplification type photoresist is a compd. prepd. by bonding a dialkyl malonate group that causes a chemical reaction under an acid as a working group to a 1-40C hydrocarbon compd. The chemical amplification type photoresist compsn. contg. the dissolution inhibitor is suitable for forming a high-contrast superior profile pattern having a high thermal decomposition temp.;COPYRIGHT: (C)1999,JPO
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