DISSOLUTION INHIBITOR FOR CHEMICAL AMPLIFICATION TYPE PHOTORESIST AND CHEMICAL AMPLIFICATION TYPE PHOTORESIST COMPOSITION CONTAINING SAME

摘要

PROBLEM TO BE SOLVED: To obtain a dissolution inhibitor for a chemical amplification type photoresist and a chemical amplification type photoresist compsn. contg. the dissolution inhibitor. ;SOLUTION: The dissolution inhibitor for a chemical amplification type photoresist is a compd. prepd. by bonding a dialkyl malonate group that causes a chemical reaction under an acid as a working group to a 1-40C hydrocarbon compd. The chemical amplification type photoresist compsn. contg. the dissolution inhibitor is suitable for forming a high-contrast superior profile pattern having a high thermal decomposition temp.;COPYRIGHT: (C)1999,JPO