The invention is assigned to a class of tools meant for study and analysis of particles and materials with the aid of optics. It may be applied in medical research, geophysics, mechanics, chemistry, powder metallurgy, control of environment etc. The aim of the invention is to raise measurement accuracy. Microobjects under study are irradiated by a radiation bundle whose maximum linear size of coherency volume in the area of irradiation does not exceed 30 % of an average distance between particles in space. Images of the studied microobjects are formed by an optical system and upon reading, their geometric parameters are read at the level of a signal depending on illumination coherency and aperture angle of the optical system.
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