High thermal conductive silicon nitride structural member, semiconductor package, heater and thermal head

摘要

A high thermal conductive silicon nitride structural member (1,7) of the present invention contains a rare earth element in the range of 1.0 to 7.5 wt. % calculated as oxide thereof and Li, Na, K, Fe, Ca, Mg, Sr, Ba, Mn and B as impurity cationic elements in a total amount not greater than 0.3 wt. %, and has the thermal conductivity not less than 60 W/(m . K), preferably not less than 80 W/(m . K). Also, a high thermal conductive silicon nitride sintered body consists of silicon nitride particles and a grain boundary phase, a crystal compound phase in the grain boundary phase being not less than 20 vol. %, preferably not less than 50 vol. %, with respect to the entire grain boundary phase, and has the thermal conductivity not less than 60 W/(m . K), preferably not less than 80 W/(m . K). A semiconductor package (9) of the present invention comprising a ceramic substrate (1) on which a semiconductor chip (2) is mounted, lead frames (5) joined to the same surface of the ceramic substrate as on which the semiconductor chip is mounted, and bonding wires (6) for electrically connecting the semiconductor chip and the lead frames, wherein the ceramic substrate is formed of the above high thermal conductive silicon nitride sintered body. IMAGE