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ROLLER STRUCTURE OF ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION SYSTEM
ROLLER STRUCTURE OF ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION SYSTEM
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机译:常压化学气相沉积系统的辊结构
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摘要
The present invention relates to a roller of an AP CVD apparatus, and more particularly, to a roller of an AP CVD apparatus, in which an etch gas or a cleaning liquid is precipitated to prevent corrosion of a ball bearing, And the yield of the wafer can be improved.
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