DREGS SUCKING APPARATUS OF A WAFER SCRUBBER

摘要

PURPOSE: a kind of slag inhalation device wafer scrubber provides a kind of yield, and a kind of is being attached to chip by washing after preventing slag floating. CONSTITUTION: the device of semiconductor crystal wafer is cleaned using washer (20), cleaning solution (24) includes plate (25), a kind of electric conductivity, whereinThe plate (25) is attachable and removably to the plate and washer between washer, with bracket (26). Therefore, the back side of polishing chip and cleaning chip, slag will not be reattached to chip.